Automatic differentiation method for the aberration analysis of electron optical systems

被引:0
|
作者
Wang, LP [1 ]
Tang, TT [1 ]
Cheng, BJ [1 ]
Cai, J [1 ]
机构
[1] Xian Jiao Tong Univ, Dept Opt & Phys Elect Engn, Xian 710049, Peoples R China
来源
OPTIK | 1999年 / 110卷 / 09期
关键词
D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Automatic differentiation (AD) is a new and promising method in numerical analysis. In this paper, the general principle of automatic differentiation method for charged particle optics is given. The aberration analysis of rotationally symmetric systems as well as deflection systems using AD method is thoroughly studied, and the extraction of Gaussian properties and third-order geometric aberration coefficients from the AD results are obtained. As examples, the Gaussian properties and the third-order geometric aberrations of bell-shaped magnetic lens and saddle-coil magnetic deflector have been calculated, and the results are of high accuracy. It is proved that the AD method is an elegant and high-accurate approach for the numerical analysis of aberrations of charged particle optical systems.
引用
收藏
页码:408 / 414
页数:7
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