Advances in Electrochemical Micromachining of Silicon: Towards MEMS Fabrication

被引：9
|
作者：
Bassu, Margherita [1 ]
Strambini, Lucanos M. [1 ]
Barillaro, Giuseppe [1 ]
机构：
[1] Univ Pisa, Dipartimento Ingn Informaz Elettron Informat Tele, I-56122 Pisa, Italy
来源：
EUROSENSORS XXV | 2011年 / 25卷
关键词：
MEMS; silicon micromachining; electrochemical etching;
D O I：
10.1016/j.proeng.2011.12.409
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In this work, a significant step towards the fabrication of very high aspect-ratio complex microsystems by silicon electrochemical micromachining in HF-based electrolytes (ECM) is given. High aspect-ratio MEMS structures, with different shape and dimensions, consisting of inertial free-standing masses equipped with comb-fingers and suspended by springs from the substrate were fabricated by exploiting advanced features of the ECM technology. (C) 2011 Published by Elsevier Ltd.
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页数：4
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