Multi-Process, Products and Machine Control Chart Application in Semiconductors

被引：0
|
作者：
Wu, Cheng June [1 ]
机构：
[1] Powerchip Technol Corp, Hsinchu, Taiwan
来源：
2018 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) | 2018年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
For foundry factories, the different products have their respective spec in foundry factories, so we standardize it and monitor the process performance by multi-process, multiproducts and multi-machine. The standardized control chart can solve the control problems of Shewhart control chart in high-mix and low-volume products, and combine with different products, machines, and process layers. It can also be used in LtL/ WtW/ WiW to get the variations of these sources immediately.
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页数：3
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