Papers from the Ninth International Vacuum Microelectronics Conference - Preface

被引：0

作者：

Fursey, GN

Glazanov, DV

Fletcher, LA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 02期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：383 / 383

页数：1

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