Wave analysis in microwave-excited plasma reactor using MSP antenna

被引：2
|
作者：
Tsuji, A. [1 ]
Yasaka, Y. [1 ]
Takeno, H. [1 ]
机构：
[1] Kobe Univ, Grad Sch Engn, Dept Elect & Elect Engn, Nada Ku, Kobe, Hyogo 6578501, Japan
来源：
SURFACE & COATINGS TECHNOLOGY | 2008年 / 202卷 / 22-23期
关键词：
Microwave discharges; Multi-slotted planar antenna; Surface wave eigenmode; Plasma resonance;
D O I：
10.1016/j.surfcoat.2008.06.007
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The structure of waves in a microwave-excited plasma reactor using the multi-slotted planar (MSP) antenna is investigated by experimental measurements and numerical analyses. As a result, it is shown that the radial mode number is fixed and equals to 5 in a wide range of the plasma density, and mode jumps of surface wave hardly appear. Mode jumps of surface wave cause the non-uniformity of the plasma density. Therefore, it is considered that the characteristic in the device is an advantage for controlling plasma parameters. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：5306 / 5309
页数：4
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