A nano measurement machine equipped with a 3D piezo-resistive micro tactile probe

被引：4
|
作者：
Cai, Xiaoyu [1 ,2 ]
Li, Yuan [2 ]
Lei, Lihua [2 ]
Fan, Guofang [3 ]
Jian, Li [2 ]
Zhang, Xuedian [1 ]
Zhuang, Songlin [1 ]
机构：
[1] Univ Shanghai Sci & Technol, Coll Opt Elect & Comp Engn, Shanghai Key Lab Contemporary Opt Syst, Shanghai 200093, Peoples R China
[2] Natl Ctr Testing Technol, Shanghai Inst Measurement & Testing Technol, Natl Ctr Measurement & Testing East China, Shanghai 201203, Peoples R China
[3] Chinese Acad Sci, Tech Inst Phys & Chem, Key Lab Photochem Convers & Optoelect Mat, Beijing 100190, Peoples R China
来源：
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2015年 / 42卷
基金：
中国国家自然科学基金;
关键词：
Nano Measurement Machine; Piezo-resistive effect; Traceable dimensional measurement; DIMENSIONAL MICRO; METROLOGY; SYSTEMS; SENSOR;
D O I：
10.1016/j.precisioneng.2015.03.007
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A 3D micro tactile probe based on piezo-resistive effect is developed for dimensional metrology and a detailed analysis on the hysteresis, resolution, crosstalk and uncertainty of the probe is presented. A Nano Measurement Machine (NMM) equipped with the 3D micro tactile probe is proposed as a new high precision zero-point indicator for micro- and nano-scale traceable dimensional measurement, which is calibrated according to the standard characteristic curve. In 1 mm step-height standard measurement experiment using the 3D piezo-resistive micro tactile probe, the experimental results show a standard deviation of 37 nm in the vertical tactile direction and one of 104 nm in transverse tactile direction while the standard deviation is 40 nm in the vertical direction in the 2 mm step-height standard measuring experiment. (C) 2015 Elsevier Inc. All rights reserved.
引用
收藏
页码：37 / 41
页数：5
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