Ultra-Small Butt-Joint Ge Photodetector Featuring Self-Aligned In-situ Doping and CMP-Free Novel CVD Process

被引：0

作者：

Miura, M. ^{[1
,2
]}

Fujikata, J. ^{[1
,2
]}

Noguchi, M. ^{[1
,2
]}

Arakawa, Y. ^{[1
,3
]}

机构：

[1] Inst Photon Elect Convergence Syst Technol PECST, Tsukuba, Ibaraki 3058569, Japan

[2] PETRA, Tsukuba, Ibaraki 3058569, Japan

[3] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan

来源：

2014 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC) | 2014年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Ultra-small butt-joint germanium photodetector featuring self-aligned in-situ doping was realized with drastically decreased process number based on novel CVD method. The photodetector showed prominently increased 3 dB bandwidth at zero bias (35 GHz).

引用

页数：3