Application of Confocal Technology Based on Polycapillary X-Ray Lens in Measuring Thickness

被引：4
|
作者：
Peng Song [1 ,2 ,3 ]
Liu Zhi-guo [1 ,2 ,3 ]
Sun Tian-xi [1 ,2 ,3 ]
Li Yu-de [1 ,2 ,3 ]
Liu He-he [1 ,2 ,3 ]
Zhao Wei-gang [1 ,2 ,3 ]
Zhao Guang-cui [1 ,2 ,3 ]
Lin Xiao-yan [1 ,2 ,3 ]
Luo Ping [1 ,2 ,3 ]
Pan Qiu-li [1 ,2 ,3 ]
Ding Xun-liang [1 ,2 ,3 ]
机构：
[1] Beijing Normal Univ, Minist Educ, Key Lab Beam Technol & Mat Modificat, Beijing 100875, Peoples R China
[2] Beijing Normal Univ, Coll Nucl Sci & Technol, Beijing 100875, Peoples R China
[3] Beijing Radiat Ctr, Beijing 100875, Peoples R China
来源：
SPECTROSCOPY AND SPECTRAL ANALYSIS | 2013年 / 33卷 / 08期
关键词：
X-ray optics; Confocal technology for measuring thickness; Polycapillary X-ray lens; X-ray fluorescence; FLUORESCENCE; FILMS;
D O I：
10.3964/j.issn.1000-0593(2013)08-2223-04
中图分类号：
O433 [光谱学];
学科分类号：
0703 ; 070302 ;
摘要：
A confocal micro X-ray fluorescence thickness gauge based on a polycapillary focusing X-ray lens, a polycapillary parallel X-ray lens and a laboratory X-ray source was designed in order to analyze nondestructively the thickness of thin film and cladding material. The performances of this confocal thickness gauge were studied. Two Ni films with a thickness of about 25 and 15 mu m respectively were measured. The relative errors corresponding to them were 3.5% and 7.1%, respectively. The thickness uniformity of a Ni films with a thickness of about 10 mu m was analyzed. This confocal technology for measuring the thickness was both spatially resolved and elemental sensitive, and therefore, it could be used to measure the thickness of the multilayer sample and analyze the thickness uniformity of the sample. This confocal thickness gauge had potential applications in analyzing the thickness of sample.
引用
收藏
页码：2223 / 2226
页数：4
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