Microstructure formation on titanium oxide (TiO2) coatings by femtosecond laser irradiation

被引：2

作者：

Osuga, Toshiaki ^{[1
]}

Fujita, Masayuki ^{[2
]}

Ichikawa, Yo ^{[3
]}

机构：

[1] Chiba Univ, Res Ctr Frontier Med Engn, Inage Ku, Chiba 2638522, Japan

[2] Inst Laser Technol, Suita, Osaka 5650871, Japan

[3] Nagoya Inst Technol, Dept Syst Engn, Nagoya, Aichi 4668555, Japan

来源：

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 2013年 / 121卷 / 1417期

关键词：

Photocatalyst; Laser ablation; Micromachining; Interference fringes; Liquid-solid interface; FILMS;

D O I：

10.2109/jcersj2.121.813

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Depressions were generated on a titanium oxide coating of 100nm thickness by irradiation with a femtosecond laser with a pulse width of 100 fs when the laser output was below 10mW. When the number of pulses was five or less, irregularities were found to be generated on the coating surface in the area corresponding to the periphery of the pulses, where the laser intensity is low, while titanium oxide was removed from the area corresponding to the center of the pulses. The formation of microstructures is expected on the surface of titanium oxide coatings by setting the output of a femtosecond laser in the periphery of the pulses to below a certain value. (C)2013 The Ceramic Society of Japan. All rights reserved.

引用

页码：813 / 815

页数：3

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