CMUTs with interlaced high- and low-frequency elements

被引：0

作者：

Zhang, Peiyu ^{[1
]}

Zheng, Wei ^{[1
]}

Moussa, Walied ^{[2
]}

Zemp, Roger J. ^{[1
]}

机构：

[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada

[2] Univ Alberta, Dept Mech Engn, Edmonton, AB T6G 2V4, Canada

来源：

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2011年

基金：

加拿大自然科学与工程研究理事会;

关键词：

CMUTs; 2D arrays; 3D ultrasound imaging; MEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate the potential of Capacitive Micromachined Ultrasound Transducers (CMUTs) for dual frequency transducer applications. We show that high and low-frequency elements may be interlaced in composite cells smaller than the shortest wavelength of ultrasound from the array. Feasibility devices are simulated, designed, and then fabricated using a modified sacrificial release process.

引用

页码：116 / 119

页数：4

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