Evaluate simulation design alternatives for large scale manufacturing systems

被引:2
|
作者
McGinnis, LF [1 ]
Xu, S [1 ]
Wang, K [1 ]
机构
[1] Georgia Inst Technol, Sch Ind & Syst Engn, Atlanta, GA 30332 USA
来源
ISSM 2005: IEEE International Symposium on Semiconductor Manufacturing, Conference Proceedings | 2005年
关键词
D O I
10.1109/ISSM.2005.1513373
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Distributed simulation promises to achieve significant parallelism in computation, which is essential in modeling wafer jabs in sufficient detail to support jab design or operational policy decision making. The High Level Architecture (HLA) is used to synchronize the simulation computations on networked computers. In designing a research and development testbed called the High Fidelity Virtual Environment for 300mm wafer jab (HiFiVE), we considered alternative different ways to distribute computational tasks to computers. This paper proposes an evaluation approach to select promising alternatives for further detailed development. Computational results show that properly distributed computational tasks can lead to substantial improvements.
引用
收藏
页码:344 / 347
页数:4
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