Misfit and dislocation nucleation during heteroepitaxial growth

被引:10
|
作者
Choudhary, Muhammad Ajmal [1 ]
Kundin, Julia [1 ]
Emmerich, Heike [1 ]
机构
[1] Univ Bayreuth, Lehrstuhl Mat & Prozesssimulat, D-95440 Bayreuth, Germany
关键词
Nucleation; Dislocations; Misfit orientations; Material modeling; PHASE-FIELD SIMULATION; EPITAXIAL-GROWTH; INSTABILITIES; FILMS;
D O I
10.1016/j.commatsci.2013.11.030
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper we present the application of an anisotropic phase-field crystal model to the process of the heteroepitaxial growth in anisotropic systems. During the growth of the thin films with sheared noncubic lattice the elastic strain gives rise to dislocations and grain boundaries due to the difference between the film and the substrate lattice in terms of lattice constant (misfit) and lattice shearing (anisotropy difference). The numerical simulations for various misfits and anisotropy difference demonstrate that the anisotropic evolution equation for the phase-field variables allows to simulate the growth of the layers in anisotropic systems. We investigate this phenomenon and derive the relationships for the phenomenological dependencies such as the dependence of the characteristic layer thickness and the number of defects on the misfit for various anisotropy difference based on our recently developed anisotropic phase-field crystal model [28]. (C) 2013 Elsevier B. V. All rights reserved.
引用
收藏
页码:481 / 487
页数:7
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