Determination of thickness and density of ultra thin iron films by grazing angle incidence X-ray fluorescence

被引：0
|
作者：
Meskauskas, Algimantas [1 ]
机构：
[1] Kaunas Univ Technol, Dept Phys, LT-50131 Kaunas, Lithuania
来源：
MATERIALS SCIENCE-MEDZIAGOTYRA | 2008年 / 14卷 / 01期
关键词：
ultra thin films; iron; X-ray fluorescence; critical angle;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An efficient and accurate method to characterize the physical thickness of ultra thin iron films is presented. Fe thin films were grown directly on n-Si(111) substrates by unbalanced magnetron system. X-ray fluorescence system was applied to measure coating thickness and perform material analysis. The composition and density of the films were characterized by measuring critical angle of reflection using X-ray fluorescence. It is shown that XRF analysis allows determination of thickness of samples potentially important for future technological interest.
引用
收藏
页码：79 / 81
页数：3
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