Simple method of surface characterization by X-ray scattering at small glancing angle of incidence using a compact UHV X-ray diffractometer

被引:0
|
作者
Fujii, Yoshikazu [1 ]
Nakayama, Takenori [2 ]
机构
[1] Kobe Univ, Ctr Supports Res & Educ Act, Nada Ku, Kobe, Hyogo 6578501, Japan
[2] Kobe Steel Ltd, Mat Res Lab, Nishi Ku, Kobe, Hyogo 6512101, Japan
关键词
X-ray scattering at glancing angle incidence; surface roughness;
D O I
10.1002/sia.2948
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
For the surface X-ray scattering experiments to be performed in a small laboratory room, we constructed a compact ultra high vacuum (UHV) X-ray diffractometer. Using this equipment, we investigated the surface roughness of iron polycrystalline surfaces. The peak profiles of the specularly reflected X-ray intensity were measured at several glancing angles of incidence. From the comparison with a simple surface structure model, it is found that the surface roughness can be immediately derived by measurements of the peak width of specularly reflected X-ray. Copyright (C) 2008 John Wiley & Sons, Ltd.
引用
收藏
页码:1722 / 1724
页数:3
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