Technical Problems in Large-aperture Phase-shifting Interferometer

被引：0

作者：

Wu, XuHua ^{[1
]}

Zhang, Chuang ^{[1
]}

Zhao, Jing ^{[1
]}

Chen, Lei ^{[2
]}

机构：

[1] Nanjing Univ Informat Sci & Technol, Coll Elect & Informat Engn, Nanjing 210044, Jiangsu, Peoples R China

[2] Nanjing Univ Informat Sci & Technol, Coll Elect Engn & Optoelect Technol, Nanjing 210094, Jiangsu, Peoples R China

来源：

2011 INTERNATIONAL CONFERENCE ON FUTURE COMPUTER SCIENCE AND APPLICATION (FCSA 2011), VOL 1 | 2011年

关键词：

optical testing; large-aperture interferometer; technical Problems; FIZEAU INTERFEROMETER;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the key techniques of large-aperture phase-shifting interferometer via PZT are discussed, including: supporting scheme for the large-aperture reference mirror, absolute test of large-aperture flat, on-line calibration of PZT, test of dynamic phase and of large-aperture collimated wavefront. Theoretical simulation and experimental measurement have been done for developing larger-aperture phase-shifting interferometers.

引用

页码：49 / 52

页数：4

共 10 条

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