Plasma post-processing of diamond-like carbon nano-coated long-period gratings

被引：0
|
作者：
Smietana, Mateusz [1 ]
Krysinski, Adrian [1 ]
Bock, Wojtek J. [2 ]
Mikulic, Predrag [2 ]
机构：
[1] Warsaw Univ Technol, Inst Microelect & Optoelect, Koszykowa 75, PL-00662 Warsaw, Poland
[2] Univ Quebec, Ctr Rech Photon, Hull, PQ J8X 3X7, Canada
来源：
FOURTH ASIA PACIFIC OPTICAL SENSORS CONFERENCE | 2013年 / 8924卷
关键词：
optical fiber sensors; long-period gratings; refractive index sensing; thin films; diamond-like carbon; optical properties; reactive ion etching; OPTICAL-PROPERTIES; FIBER GRATINGS; FILMS; SENSITIVITY; DEPOSITION; THICKNESS; SURFACE;
D O I：
10.1117/12.2031698
中图分类号：
TP7 [遥感技术];
学科分类号：
081102 ; 0816 ; 081602 ; 083002 ; 1404 ;
摘要：
This work presents an application of reactive ion etching (RIE) for effective tuning of spectral response and the refractive-index (RI) sensitivity of diamond-like carbon (DLC) nano-coated long-period gratings (LPGs). The technique allows for an efficient and well controlled etching of the DLC by means of O-2 and CF4 plasma. The effect of DLC nano-coating etching on spectral properties of the LPGs is discussed. We correlated the decrease in DLC thickness with the shift of the LPG resonance wavelength. The thinning of the overlay effectively changes the distribution of the cladding modes and thus it also has an impact on the device's RI sensitivity. The advantage of this approach is a capability for post-processing of the nano-coated structures with a good precision (etching rate from 4.6 to 8.1 nm/min for O-2 plasma), cleaning the samples and their re-coating according to requested needs.
引用
收藏
页数：4
相关论文
共 50 条
  • [1] Tuning properties of long-period gratings by plasma post-processing of their diamond-like carbon nano-overlays
    Smietana, M.
    Koba, M.
    Mikulic, P.
    Bock, W. J.
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2014, 25 (11)
  • [2] Non-uniform nano-coated long-period fiber gratings for sensing applications
    Paladino, Domenico
    Cutolo, Antonello
    Cusanoa, Andrea
    Del Villar, Ignacio
    Matias, Ignacio R.
    Arregui, Francisco J.
    [J]. THIRD EUROPEAN WORKSHOP ON OPTICAL FIBRE SENSORS, 2007, 6619
  • [3] Enhancing sensitivity of long-period gratings by combined fiber etching and diamond-like carbon nano-overlay deposition
    Smietana, Mateusz
    Koba, Marcin
    Mikulic, Predrag
    Bock, Wojtek J.
    [J]. 24TH INTERNATIONAL CONFERENCE ON OPTICAL FIBRE SENSORS, 2015, 9634
  • [4] Optical effect of diamond-like carbon film coating of long-period optical fiber gratings
    Smietana, M.
    Szmidt, J.
    Korwin-Pawlowski, M. L.
    Bock, W. J.
    [J]. PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS VOL 4, NO 4, 2007, 4 (04): : 1574 - +
  • [5] Application of diamond-like carbon films in optical fibre sensors based on long-period gratings
    Smietana, M.
    Szmidt, J.
    Korwin-Pawlowski, M. L.
    Bock, W. J.
    Grabarczyk, J.
    [J]. DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) : 1374 - 1377
  • [6] Ultrasensitive tantalum oxide nano-coated long-period gratings for detection of various biological targets
    Piestrzynska, Monika
    Dominik, Magdalena
    Kosiel, Kamil
    Janczuk-Richter, Marta
    Szot-Karpinska, Katarzyna
    Brzozowska, Ewa
    Shao, Liyang
    Niedziolka-Jonsson, Joanna
    Bock, Wojtek J.
    Smietana, Mateusz
    [J]. BIOSENSORS & BIOELECTRONICS, 2019, 133 : 8 - 15
  • [7] Combined Plasma-Based Fiber Etching and Diamond-Like Carbon Nanooverlay Deposition for Enhancing Sensitivity of Long-Period Gratings
    Smietana, Mateusz
    Koba, Marcin
    Mikulic, Predrag
    Bock, Wojtek J.
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2016, 34 (19) : 4615 - 4619
  • [8] Analysis of Mode Transitions in a Long-Period Fiber Grating with a Nano-Overlay of Diamond-Like Carbon
    Brabant, D.
    Koba, M.
    Smietana, Mateusz
    Bock, Wojtek J.
    [J]. PHOTONICS NORTH 2014, 2014, 9288
  • [9] Regeneration of titanium oxide nano-coated long-period grating biosensor
    Dominik, M.
    Niedziolka-Jonsson, J.
    Rozniecka, E.
    Wachnicki, L.
    Godlewski, M.
    Mikulic, Predrag
    Bock, Wojtek J.
    Smietana, M.
    [J]. SIXTH EUROPEAN WORKSHOP ON OPTICAL FIBRE SENSORS, 2016, 9916
  • [10] Nano-coated long-period gratings for detection of sub-nanometric changes in thin-film thickness
    Smietana, Mateusz
    Mikulic, Predrag
    Bock, Wojtek J.
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2018, 270 : 79 - 83
12345