An Optimal 2D and 3D Modelling of Finite SAW and BAW Devices Based on Perfectly Matched Layer Method

被引：0

作者：

Dbich, K. ^{[1
]}

Laroche, T. ^{[1
]}

Ballandras, S. ^{[1
]}

Mayer, M. ^{[2
,3
]}

Perois, X. ^{[2
,3
]}

Wagner, K. ^{[2
,3
]}

机构：

[1] FEMTO ST, CNRS, UMR 6174, Time & Frequency Dept, Besancon, France

[2] TDK, Sophia Antipolis, France

[3] TDK, Munich, Germany

来源：

2012 EUROPEAN FREQUENCY AND TIME FORUM (EFTF) | 2012年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The characterization of finite length Surface Acoustic Wave (SAW) and Bulk acoustic Wave (BAW) resonators is addressed here. The Finite Element Analysis (FEA) induces artificial wave reflections at the edges of the mesh. In fact, these ones do not contribute in practice to the corresponding experimental response. The Perfectly Matched Layer (PML) method, allows to suppress the boundary reflections. In this work, we first demonstrate the basis of PML adapted to FEA formalism. Next, the results of such a method is depicted allowing a discussion on the behavior of finite acoustic resonators.

引用

页码：200 / 205

页数：6

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