A highly sensitive Pt-doped ZnO based Ethanol sensor

被引：0
|
作者：
Deshwal, Manish [1 ]
Arora, Anil [1 ]
机构：
[1] Thapar Univ, Elect & Commun Engn Dept, Patiala, Punjab, India
来源：
2017 INTERNATIONAL CONFERENCE ON EMERGING TRENDS IN COMPUTING AND COMMUNICATION TECHNOLOGIES (ICETCCT) | 2017年
关键词：
coplanar microheater & IDE; Ethanol sensor; ZnO thin films; THIN-FILMS; MEMS; GAS; PLATFORM;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
A chemoresistive sensor for ethanol with Pt-microdots doped zinc oxide (ZnO) thin film as sensing layer has been studied with a coplanar microheater architecture with interdigitated electrodes (IDE's). ZnO thin films are fabricated using the sol-gel method. The doping with platinum is performed by RF Sputtering method. The present study suggests the use of a coplanar microheater with IDE's fabricated for the ethanol sensor. Further, the effect of doping on sensing properties of the sensor has been studied. The sensing response of the sensor with the film thickness of 430 nm at an operating temperature of 180 degrees C comes out to be 110. The prime aim of the study is to present a highly sensitive ethanol sensor having a coplanar architecture of microheater with IDE's in a ZnO based sensor.
引用
收藏
页码：159 / 161
页数：3
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