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Estimation of Focused Helium Ion Beam Josephson Junction Width

被引：2
|
作者：
Wang, Yan-Ting [1 ]
Cho, Ethan Y. [2 ]
Li, Hao [2 ]
Cybart, Shane A. [2 ]
机构：
[1] Univ Calif Riverside, Mat Sci & Engn Program, Riverside, CA 92521 USA
[2] Univ Calif Riverside, Dept Elect & Comp Engn, Riverside, CA 92521 USA
来源：
2019 IEEE INTERNATIONAL SUPERCONDUCTIVE ELECTRONICS CONFERENCE (ISEC) | 2019年
基金：
美国国家卫生研究院; 美国国家科学基金会;
关键词：
Josephson junctions; focused helium ion beam; high temperature superconductor; DIELECTRIC-PROPERTIES;
D O I：
10.1109/isec46533.2019.8990939
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Josephson junctions fabricated with a focused helium ion beam exhibit electrical properties that are strongly dependent on the size of the junction. The length of the junction, in the direction of the super-current, is one of the critical parameters. In this report, we compare three methods of estimating this critical feature, utilizing resistive and capacitive transport data and Monte Carlo ion implantation simulations. Our results find that the barrier is 3 +/- 1 nm long and agree well with one another.
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页数：3
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