3D Microstructuring of Silicate Glass by Femtosecond Laser Radiation

被引：6
|
作者：
Rupasov, A. E. [1 ]
Danilov, P. A. [1 ]
Smaev, M. P. [1 ,2 ]
Kovalev, M. S. [3 ]
Zolot'ko, A. S. [1 ]
Ionin, A. A. [1 ]
Kudryashov, S., I [1 ,4 ]
机构：
[1] Russian Acad Sci, Lebedev Phys Inst, Moscow 119991, Russia
[2] Mendeleev Univ Chem Technol Russia, Moscow 125047, Russia
[3] Bauman Moscow State Tech Univ, Moscow 105005, Russia
[4] ITMO Univ, St Petersburg 197101, Russia
来源：
OPTICS AND SPECTROSCOPY | 2020年 / 128卷 / 07期
关键词：
direct laser writing; femtosecond laser pulses; bulk functional nano; and micro-optical me-tastructures; birefringence;
D O I：
10.1134/S0030400X20070188
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Silicon glass was microstructured by means of linear one-dimensional scanning of a tightly focused femtosecond laser beam with visible spectrum and different polarization in the bulk of the material. Optical microscopy revealed the formation of microstructures demonstrating enhanced extinction in the blue spectral range when the laser beam had linear or circular polarization. However, no birefringence was found in the microstructures.
引用
收藏
页码：928 / 931
页数：4
相关论文
共 50 条
  • [1] 3D Microstructuring of Silicate Glass by Femtosecond Laser Radiation
    A. E. Rupasov
    P. A. Danilov
    M. P. Smaev
    M. S. Kovalev
    A. S. Zolot’ko
    A. A. Ionin
    S. I. Kudryashov
    [J]. Optics and Spectroscopy, 2020, 128 : 928 - 931
  • [2] 3D microstructuring of glass by femtosecond laser direct writing and application to biophotonic microchips
    Sugioka, Koji
    Hanada, Yasutaka
    Midorikawa, Katsumi
    [J]. PIERS 2008 HANGZHOU: PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM, VOLS I AND II, PROCEEDINGS, 2008, : 942 - 946
  • [3] 3D MICROSTRUCTURING OF GLASS BY FEMTOSECOND LASER DIRECT WRITING AND APPLICATION TO BIOPHOTONIC MICROCHIPS
    Sugioka, K.
    Hanada, Y.
    Midorikawa, K.
    [J]. PROGRESS IN ELECTROMAGNETICS RESEARCH LETTERS, 2008, 1 : 181 - 188
  • [4] 3D microstructuring inside glass by ultrafast laser
    Sugioka, Koji
    Hanada, Yasutaka
    Midorikawa, Katsumi
    Kawano, Hiroyuki
    Ishikawa, Ikuko S.
    Miyawaki, Atsushi
    [J]. PACIFIC RIM LASER DAMAGE 2011: OPTICAL MATERIALS FOR HIGH POWER LASERS, 2012, 8206
  • [5] 3-D microstructuring inside photosensitive glass by femtosecond laser excitation
    Masuda, M
    Sugioka, K
    Cheng, Y
    Aoki, N
    Kawachi, M
    Shihoyama, K
    Toyoda, K
    Helvajian, H
    Midorikawa, K
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2003, 76 (05): : 857 - 860
  • [6] 3-D microstructuring inside photosensitive glass by femtosecond laser excitation
    M. Masuda
    K. Sugioka
    Y. Cheng
    N. Aoki
    M. Kawachi
    K. Shihoyama
    K. Toyoda
    H. Helvajian
    K. Midorikawa
    [J]. Applied Physics A, 2003, 76 : 857 - 860
  • [7] 3D microstructuring inside photosensitive glass by use of a femtosecond laser for lab.-on-chip applications
    Cheng, Y
    Sugioka, K
    Masuda, M
    Midorikawa, K
    Kawachi, M
    Shihoyama, K
    Toyoda, K
    [J]. PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II, 2003, 4977 : 314 - 323
  • [8] 3D microfabrication in photosensitive glass by femtosecond laser
    Masuda, M
    Sugioka, K
    Cheng, Y
    Aoki, N
    Kawachi, M
    Shihoyama, K
    Toyoda, K
    Midorikawa, K
    [J]. THIRD INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 4830 : 576 - 580
  • [9] Femtosecond laser microfabrication of 3D structures in Foturan glass
    Cheng, Ya
    Xu, Zhizhan
    Sugioka, Koji
    Midorikawa, Katsumi
    [J]. FEMTOSECOND PHENOMENA AND NONLINEAR OPTICS III, 2006, 6400
  • [10] 3D Manufacturing of Glass Microstructures Using Femtosecond Laser
    Butkute, Agne
    Jonusauskas, Linas
    [J]. MICROMACHINES, 2021, 12 (05)
12345