Synthetic-wavelength-based dual-comb interferometry for fast and precise absolute distance measurement

被引:67
|
作者
Zhu, Zebin [1 ]
Xu, Guangyao [1 ]
Ni, Kai [2 ]
Zhou, Qian [2 ]
Wu, Guanhao [1 ,2 ]
机构
[1] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Grad Sch Shenzhen, Div Adv Mfg, Shenzhen 518055, Peoples R China
来源
OPTICS EXPRESS | 2018年 / 26卷 / 05期
关键词
FREQUENCY COMB;
D O I
10.1364/OE.26.005747
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present an absolute distance measurement system using a phase-stable dual-comb system with 56.09 MHz repetition rate and 2 kHz repetition rate difference. A relative phase stability of 0.1 rad in 0.5 ms between two combs is achieved using a mutual locking scheme. The dual-comb ranging system combines the time-of-flight (TOF) method, synthetic-wavelength interferometry (SWI), and carrier wave interferometry (CWI). Each method provides a particular ambiguity range and resolution, and they can be applied simultaneously and linked to enhance the precision and measurement rate of the ranging system. The experimental results demonstrate that a precision of 1.2 mu m is obtained without time averaging, and the precision can be improved to 3 nm with only 10 ms averaging time using the SWI method described in this study. The precision reaches a sub-nanometer when the averaging time exceeds 0.1 s. A system with high accuracy and short averaging time would enhance fast measurement performance in various industrial applications. The ambiguity range is about 2.67 m in our system, we test the performance of the system with 1.5 mm range at 1.5 m distance. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:5747 / 5757
页数:11
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