Fabrication of functional components for electromagnetic microactuators

被引：7
|
作者：
Ruffert, C
Feldmann, M
Buettgenbach, S
Gatzen, HH
机构：
[1] Univ Hannover, Inst Microtechnol, D-30823 Garbsen, Germany
[2] Tech Univ Carolo Wilhelmina Braunschweig, Inst Microtechnol, D-38106 Braunschweig, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 07期
关键词：
D O I：
10.1007/s00542-006-0091-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
With basic components for active drive systems (like coils, magnetic components like yokes and cores, and guides) available and their fabrication processes well established, the emphasis shifts to further optimize them. This may be accomplished by applying new materials or by further improving the fabrication technologies. This paper presents recent developments in the field of materials and technologies for components of the microactuator drive systems, as well as the latest results in optimizing the microactuator's guides.
引用
收藏
页码：670 / 675
页数：6
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