Optical triangulation for the microtopographic inspection of rough surfaces

被引:0
|
作者
Costa, MFM [1 ]
机构
[1] Univ Minho, Dept Fis, P-4719 Braga, Portugal
关键词
triangulation; rough surfaces; dimensional metrology;
D O I
10.1117/12.358392
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Optical triangulation, as a non-contact non-destructive method, extensively proved its usefulness on the topographic and dimensional inspection of objects and surfaces of use in the industrial world. In this communication we will make a brief presentation of the issue of the micro-inspection of the relief structure of rough surfaces by optical triangulation. The microtopographers developed at the Physics Department of the Universidade do Minho will be briefly described.
引用
收藏
页码:331 / 334
页数:4
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