In situ, real-time thickness measurement techniques for bath-deposited CdS thin films on Cu(In,Ga)Se2

被引：3
|
作者：
Mann, Jonathan R. [1 ]
Noufi, Rommel [1 ]
机构：
[1] Natl Renewable Energy Lab, Golden, CO 80401 USA
来源：
THIN SOLID FILMS | 2012年 / 520卷 / 24期
关键词：
Cadmium sulfide; Thickness; Real-time measurements; In situ; Metrology; Copper indium gallium selenide; SOLAR-CELLS; CBD-CDS; EFFICIENCY; LAYER;
D O I：
10.1016/j.tsf.2012.07.102
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A technique has been developed that can measure the thickness of a 30-70 nm thin film of cadmium sulfide on a Cu(In,Ga)Se-2 substrate, in real time, as it grows in a chemical bath. The technique does not damage the film, and can be used to monitor batch depositions and roll-to-roll depositions with equal accuracy. The technique is based on reflectance spectroscopy through the chemical bath. (C) 2012 Published by Elsevier B.V.
引用
收藏
页码：7183 / 7188
页数：6
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