Photon-counting scatterometer with illumination adjusting and intensity stitching

被引：2
|
作者：
Kiire, Tomohiro [1 ]
Meguriya, Tomoyuki [1 ]
Barada, Daisuke [1 ,2 ]
Hayasaki, Yoshio [1 ]
Yatagai, Toyohiko [1 ]
机构：
[1] Utsunomiya Univ, Ctr Opt Res & Educ, Utsunomiya, Tochigi 3218585, Japan
[2] Utsunomiya Univ, Grad Sch Engn, Utsunomiya, Tochigi 3218585, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2014年 / 53卷 / 02期
关键词：
SURFACE CHARACTERIZATION TECHNIQUES; LIGHT-SCATTERING; OPTICAL MULTILAYERS; ROUGHNESS; COMPONENTS; INSTRUMENT;
D O I：
10.7567/JJAP.53.022501
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
For scattered light measurements, a novel scatterometer that is based on photon counting using extinction filters is proposed. A photon counter is used as the detector, with the advantages of high dynamic range, high linearity, and detection of light down to the single-photon level. Extinction filters expand the dynamic range of the detector, and data acquired using the filters are stitched together. The use of the photon counting device and the extinction filters results in a dynamic range extending over 11 orders of magnitude. Light scattered by three parallel slabs of glass are measured, and compared with roughness parameters obtained by atomic force microscopy. (C) 2014 The Japan Society of Applied Physics
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页数：4
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