Structural, optical and electrical characteristics of ITO thin films deposited by sputtering on different polyester substrates

被引：22

作者：

Guillen, C. ^{[1
]}

Herrero, J. ^{[1
]}

机构：

[1] CIEMAT, Dep Energia, E-28040 Madrid, Spain

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2008年 / 112卷 / 02期

关键词：

Thin films; Sputtering; Crystal structure; Electrical properties; Optical properties;

D O I：

10.1016/j.matchemphys.2008.06.027

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Indium tin oxide (ITO) thin films were deposited by sputtering at room temperature on glass and different polyester substrates; namely polyarylate (PA), polycarbonate (PC) and polyethylene tereplitalate (PET). The influence of the substrate on the structural, optical and electrical characteristics of the ITO layers was investigated. The sputtered films exhibited crystallization in the (2 2 2) orientation, with higher mean crystallite size and lower structural distortion onto PET than onto PA, PC or glass substrates. ITO films deposited onto PET showed also higher band gap energy, higher carrier concentration and lower resistivity than the ITO layers onto the other tested substrates. These optical and electrical characteristics have been related to the structural distortion that was found dependent on the specific polyester substrate. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：641 / 644

页数：4

共 50 条

[1] Structural, Optical, and Electrical Characteristics of Thermal Treated ZnO Thin Films Deposited by RF Sputtering on Glass Substrates
Al-Khalli, Najeeb
Aboud, Mohamed F. Aly
Bagabas, Abdulaziz A.
Debbar, Nacer
[J]. MATERIALS TRANSACTIONS, 2021, 62 (07) : 915 - 920
[2] Investigation of structural properties of ITO thin films deposited on different substrates
Purica, M.
Iacomi, F.
Baban, C.
Prepelita, P.
Apetroaei, N.
Mardare, D.
Luca, D.
[J]. THIN SOLID FILMS, 2007, 515 (24) : 8674 - 8678
[3] Electrical, optical and structural characteristics of gallium oxide thin films deposited by RF-sputtering
Juarez-Amador, L. I.
Galvan-Arellano, M.
Andraca-Adame, J. A.
Romero-Paredes, G.
Kennedy-Magos, A.
Pena-Sierra, R.
[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2018, 29 (18) : 15726 - 15731
[4] Electrical, optical and structural characteristics of gallium oxide thin films deposited by RF-sputtering
L. I. Juárez-Amador
M. Galván-Arellano
J. A. Andraca-Adame
G. Romero-Paredes
A. Kennedy-Magos
R. Peña-Sierra
[J]. Journal of Materials Science: Materials in Electronics, 2018, 29 : 15726 - 15731
[5] Enhanced structural, electrical and optical properties of evaporated CdZnTe thin films deposited on different substrates
Chander, Subhash
Dhaka, M. S.
[J]. MATERIALS LETTERS, 2017, 186 : 45 - 48
[6] Structural and optical properties of ZnO thin films deposited onto ITO/glass substrates
Rusu, M.
Rusu, G. G.
Girtan, M.
Seignon, S. Dabos
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2008, 354 (35-39) : 4461 - 4464
[7] Study on optical and electrical properties of ITO thin films deposited by DC reactive magnetron sputtering
Key Laboratory for Silicate Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China
[J]. Rengong Jingti Xuebao, 2006, 2 (272-275+232):
[8] Effect of Different Substrates on the Wettability and Electrical Properties of Au Thin Films Deposited by Sputtering
Dhar, Aritra
Zhao, Zhao
Alford, T. L.
[J]. JOM, 2015, 67 (04) : 845 - 848
[9] Effect of Different Substrates on the Wettability and Electrical Properties of Au Thin Films Deposited by Sputtering
Aritra Dhar
Zhao Zhao
T. L. Alford
[J]. JOM, 2015, 67 : 845 - 848
[10] Structural, morphological, optical and electrical characterization of MgO thin films grown by sputtering technique on different substrates
Toprak, Basak caglayan
Efkere, Halil Ibrahim
Aydin, Saime Sebnem
Tataroglu, Adem
Ozcelik, Suleyman
[J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2024, 35 (20)

← 1 2 3 4 5 →