PIEZOELECTRIC PARAMETRIC AMPLIFIERS WITH INTEGRATED ACTUATION AND SENSING CAPABILITIES

被引：0

作者：

Thomas, O. ^{[1
]}

Mathieu, F. ^{[2
]}

Mansfield, W. ^{[3
]}

Huang, C. ^{[3
]}

Trolier-McKinstry, S. ^{[3
]}

Nicu, L. ^{[2
]}

机构：

[1] Arts & Metiers ParisTech LSIS, Paris, France

[2] CNRS, LAAS, F-75700 Paris, France

[3] Penn State Univ, University Pk, PA 16802 USA

来源：

26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013) | 2013年

关键词：

AMPLIFICATION; OSCILLATOR; RESONANCE; FILTERS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.

引用

页码：588 / 591

页数：4

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