3-D MICROMACHINED HEMISPHERICAL SHELL RESONATORS WITH INTEGRATED CAPACITIVE TRANSDUCERS

被引：0
|
作者：
Sorenson, L. D. [1 ]
Gao, X. [1 ]
Ayazi, F. [1 ]
机构：
[1] Georgia Inst Technol, Atlanta, GA 30332 USA
来源：
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2012年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a self-aligned fabrication method developed for three-dimensional (3-D) microscale hemispherical shell resonators with integrated capacitive transducers and a center post for electrical access to the shell. The self-aligned process preserves the axisymmetry for robust, balanced resonators that can potentially reach very high-Q due to suppressed anchor loss. High-Q operation of a thin polycrystalline silicon shell resonator is verified by exciting devices capacitively into a breathing resonance mode, with measured Q of 8,000 at 412 kHz in vacuum. This process can be further optimized to batch-fabricate micro-hemispherical resonator gyroscopes for portable inertial navigation.
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页数：4
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