NH3 as nitrogen source in MBE growth of GaN

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作者
Kamp, M [1 ]
Mayer, M [1 ]
Pelzmann, A [1 ]
Thies, A [1 ]
Chung, HY [1 ]
Sternschulte, H [1 ]
Marti, O [1 ]
Ebeling, KJ [1 ]
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[1] UNIV ULM,DEPT OPTOELECT,D-89069 ULM,GERMANY
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:135 / 139
页数:5
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