3D photonic crystals based on macroporous silicon: Towards a large complete photonic bandgap

被引：12
|
作者：
Schilling, J [1 ]
Scherer, A [1 ]
机构：
[1] CALTECH, Pasadena, CA 91125 USA
来源：
PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS | 2005年 / 3卷 / 2-3期
关键词：
photonic crystals; photonic bandgap; macroporous silicone; focused ion beam;
D O I：
10.1016/j.photonics.2005.09.015
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Recently, a new three-dimensional photonic crystal consisting of two interpenetrating hexagonal pore sets was introduced. Here, we investigate the influence of possible experimental errors including shift, tilt and rotation of one pore set on the size of the bandgap theoretically and determine fabrication tolerances. A structure is fabricated in silicon using photo-electrochemical etching and subsequent focused ion beam milling. The change of the cross-section of the milled pores with pore depth is investigated and reflection measurements along different directions are performed indicating the low frequency edge of the photonic bandgap. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：90 / 95
页数：6
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