Tactile-optical probes for three-dimensional microparts

The dimensional measurement of microsystem components is a field of application that is gaining more and more importance. While optical probing systems offer a number of advantages, their performance is strongly affected by the varying optical properties of the measured surfaces. For this reason, tactile probing systems are essential to many fields of micrometrology. Since conventional tactile probing systems are not suitable for the measurement of microparts, there is a demand for new tactile probing systems that are specifically adapted to the requirements of micrometrology. The tactile-optical Werth Fiber Probe is an established solution within this scope of application. In the present paper, two recent approaches to adding full 3D capabilities to the fiber probe principle are proposed. First prototypes of these sensors are shown and the obtained results are discussed. (C) 2011 Elsevier Ltd. All rights reserved.