Multireflection modal method for wideband fused-silica transmission gratings

被引：8
|
作者：
Sun, Wenting [1 ]
Lv, Peng [1 ]
Zhou, Changhe [1 ]
Cao, Hongchao [1 ]
Wu, Jun [1 ]
机构：
[1] Acad Sinica, Shanghai Inst Opt & Fine Mech, Lab Informat Opt & Optoelect Technol, Shanghai 201800, Peoples R China
来源：
APPLIED OPTICS | 2013年 / 52卷 / 12期
基金：
中国国家自然科学基金;
关键词：
POLARIZING BEAM SPLITTER; LAMELLAR GRATINGS; BINARY GRATINGS; DEEP; DIFFRACTION; EFFICIENCY; COMPRESSION;
D O I：
10.1364/AO.52.002800
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A multireflection modal method is proposed to give a clear physical picture for explanation of the diffraction process that takes place in a wideband fused-silica transmission grating. Using rigorous coupled-wave analysis, the optimized grating exhibits diffraction efficiency greater than 93.9% for TE polarization over a bandwidth of 126 nm (from 735 to 861 nm). The designed wideband fused-silica transmission grating is fabricated using holographic interference recording and inductively coupled plasma etching technology. Experimental results are in agreement with the theoretical values. (C) 2013 Optical Society of America
引用
收藏
页码：2800 / 2807
页数：8
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