Influence of the substrate temperature on the structure of SrBi2Ta2O9 thin films obtained by laser ablation

被引：0
|
作者：
Díaz, JA [1 ]
Cruz, MP [1 ]
Contreras, OE [1 ]
Siqueiros, JM [1 ]
Portelles, J [1 ]
机构：
[1] Ctr Invest Cient & Educ Super Ensenada, Ensenada, Baja California, Mexico
来源：
FERROELECTRIC THIN FILMS VII | 1999年 / 541卷
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A systematic study is presented of the resulting SET films deposited by PLD at substrate temperatures from 300 to 600 degrees C. The characteristics of the film as-deposited are determined. Special attention is focused on the compositional and structural properties. XRD, SEM, and TEM analyses are reported.
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页码：211 / 215
页数：5
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