A piezoelectric triaxial accelerometer

被引：62
|
作者：
Scheeper, P
Gullov, JO
Kofoed, LM
机构：
[1] Brüel and Kjær A/S, 2850 Nærum
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 01期
关键词：
D O I：
10.1088/0960-1317/6/1/032
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new piezoelectric silicon accelerometer design is presented. The design allows sensing in three directions. The accelerometer is designed to have a detection level of 10(-3) m s(-2) Hz(-1/2) and a resonance frequency of 10 kHz.
引用
收藏
页码：131 / 133
页数：3
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