RF-MBE growth of semipolar InN(10-13) and InGaN(10-13) on GaAs(110)

We have studied InN and InGaN films grown on GaAs(110) substrates by RF-assisted molecular beam epitaxy. Reflection high-energy diffraction observation and X-ray diffraction (XRD) measurements revealed that the InN films were epitaxially grown with InN(10-13)//GaAs(110). From XRD pole figure measurements, only one InN(0002) peak was found at an angle of 31.8 degrees from the pole, indicating that the semipolar InN films were free from twin crystals. This can be explained by the similarity in the anisotropic structure between InN(10-13) and GaAs(110) surfaces. By using low-temperature InN buffer layers, we could obtain semipolar InN films with a smooth surface. Polarization anisotropy in the photoluminescence peak observed at 0.67 eV from semipolar InN(10-13) was weaker than that from alpha-plane InN, which is reasonable considering the smaller angle between the c-axis and the perpendicular direction to the semipolar InN surface. We have also successfully grown In-rich InGaN(10-13) on GaAs(110) substrates with an InN(10-13) intermediate layer, and observed strong photoluminescence from the semipolar InGaN films. (C) 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim