A method for the location of specific points on surfaces in the SEM

A method for precisely locating points on large surfaces during SEM examination and for Ending corresponding points on matching surfaces (such as those resulting from the fracture of a solid body) is described. This method also allows for the repeated examination of specific points during subsequent SEM sessions after the specimen has been removed and replaced in the SEM. The method is based on a coordinate transformation between the SEM stage coordinates and specimen coordinate systems defined by arbitrarily chosen reference points on the specimen.