Investigation of the process of pulsed laser deposition of BaTiO3 ferroelectric thin films for device applications

被引：0
|
作者：
Kabadjova, TD [1 ]
Atanasov, PA [1 ]
Tomov, RI [1 ]
Zherikhin, A [1 ]
Ouzounov, DG [1 ]
机构：
[1] Bulgarian Acad Sci, Inst Elect, BU-1784 Sofia, Bulgaria
来源：
TENTH INTERNATIONAL SCHOOL ON QUANTUM ELECTRONICS: LASER PHYSICS AND APPLICATIONS | 1999年 / 3571卷
关键词：
D O I：
10.1117/12.347650
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Thin films of BaTiO3 were deposited by KrF excimer laser ablation (248nm) on Si substrates at different substrate temperatures and various oxygen pressures. The process of ablation of the ceramic BaTiO3 targets was investigated. The composition was measured by EDX microanalysis. The morphology and optical properties of the films were analyzed by SEM and ellipsometry respectively. The dielectric constant was estimated by LCR meter.
引用
收藏
页码：349 / 353
页数：5
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