Micro and nanophotonics in silicon: new perspectives and applications

被引：0

作者：

Casalino, Maurizio ^{[1
]}

Coppola, Giuseppe ^{[1
]}

Dardano, Principia ^{[1
]}

De Stefano, Luca ^{[1
]}

De Tommasi, Edoardo ^{[1
]}

Ferrara, Maria Antonietta ^{[1
]}

Gioffre, Mariano ^{[1
]}

Iodice, Mario ^{[1
]}

Mocella, Vito ^{[1
]}

Rea, Ilaria ^{[1
]}

Sirleto, Luigi ^{[1
]}

Rendina, Ivo ^{[1
]}

机构：

[1] CNR, Inst Microelect & Microsyst, I-80131 Naples, Italy

来源：

PHOTONIC MATERIALS, DEVICES, AND APPLICATIONS III | 2009年 / 7366卷

关键词：

Silicon photonics; Photonic crystals; Negative refraction; Stimulated Raman Scattering; Resonant cavity enhanced photodetector; Porous silicon optical sensors; ARCHAEON THERMOCOCCUS-LITORALIS; SURFACE TERMINATION; MACROPOROUS SILICON; NEGATIVE REFRACTION; BINDING PROTEIN; LIGHT; MICROCAVITIES; BIOSENSOR; AREA;

D O I：

10.1117/12.822676

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In the last few years, silicon photonics has been characterized by a wide range of applications in several fields, from communications to sensing, from biophotonics to the development of new artificial materials. In this communication, we report a review of the main results obtained in our laboratories in design, fabrication and characterization of new silicon-based optical structures and devices, including metamaterials, photodetectors, raman light amplifiers, and porous silicon based bio-chemical sensors and biochips. Future perspectives in integration of silicon based MEMS and MOEMS are also presented.

引用

页数：17

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