Use of Ta2O5 biaxial thin film as a high-efficiency polarization converter

被引:8
|
作者
Lin, Chia-Feng [1 ]
Jen, Yi-Jun [1 ]
机构
[1] Natl Taipei Univ Technol, Dept Electopt Engn, Taipei 106, Taiwan
关键词
oblique angle deposition; biaxial thin film; polarization conversion; BROAD-BAND; CONVERSION; ANGLE; REFLECTION; DEPOSITION; INDEXES; FILTERS; PLATE;
D O I
10.1117/1.JNP.6.061507
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A columnar Ta2O5 thin film was fabricated with oblique angle deposition and applied in a prism coupling system as a polarization converter. The transmission, reflection and propagation for the wave reflected in one-round trip from the biaxial film were analyzed. Constructive interference occurred for polarization coupling to achieve polarization conversion. Birefringence of the biaxial thin film provided a sophisticated phase compensation as the incident angle varied over a large range to have a wide-angle polarization conversion. For broadband illumination applications, high polarization conversion efficiency was achieved over visible wavelengths. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI:10.1117/1.JNP.6.061507]
引用
收藏
页数:9
相关论文
共 50 条
  • [1] Optical properties and microstructure of Ta2O5 biaxial film
    Qi, Hongji
    Xiao, Xiudi
    He, Hongbo
    Yi, Kui
    Fan, Zhengxiu
    [J]. APPLIED OPTICS, 2009, 48 (01) : 127 - 133
  • [2] Investigation of Ta2O5 thin film evolution
    Kristóf, J
    De Battisti, A
    Keresztury, G
    Horváth, E
    Szilágyi, T
    [J]. LANGMUIR, 2001, 17 (05) : 1637 - 1640
  • [3] A novel high-efficiency photocatalyst Ta2O5/PtCl2 nanosheets for benzotriazole degradation
    Li, Zheng
    He, Zijian
    Lai, Huajie
    He, Yuan
    Zhu, Zifan
    Chen, Yufang
    Jin, Tao
    [J]. JOURNAL OF ENVIRONMENTAL CHEMICAL ENGINEERING, 2021, 9 (06):
  • [4] Investigation of IrO2/Ta2O5 thin film evolution
    Kristóf, J
    Szilágyi, T
    Horváth, E
    De Battisti, A
    Frost, RL
    Rédey, A
    [J]. THERMOCHIMICA ACTA, 2004, 413 (1-2) : 93 - 99
  • [5] Deposition and evaluation of Ta2O5 piezoelectric thin film on Pt crystal film
    Matsuura, Keisuke
    Suzuki, Masashi
    Kakio, Shoji
    Kodera, Masanori
    Funakubo, Hiroshi
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2022, 61 (SG)
  • [6] Hydrogen Gas Sensors Using a Thin Ta2O5 Dielectric Film
    Kim, Seongjeen
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2014, 65 (11) : 1749 - 1753
  • [7] Pentacene Thin-Film Transistors with Ta2O5 as the Gate Dielectric
    Dong, Guifang
    Qiu, Yong
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 54 (01) : 493 - 497
  • [8] Hydrogen gas sensors using a thin Ta2O5 dielectric film
    Seongjeen Kim
    [J]. Journal of the Korean Physical Society, 2014, 65 : 1749 - 1753
  • [9] Thermal Ta2O5 films as a gate insulator for thin film capacitors
    Spassov, D
    Atanassova, E
    [J]. INTERNATIONAL JOURNAL OF ELECTRONICS, 1998, 84 (05) : 453 - 466
  • [10] Ta2O5 thin films with exceptionally high dielectric constant
    Lin, J
    Masaaki, N
    Tsukune, A
    Yamada, M
    [J]. APPLIED PHYSICS LETTERS, 1999, 74 (16) : 2370 - 2372