Precision Robotic system for 3-D Micro-Assembly

A type of robotic system for 3-D precision Micro-assembly was described, which can be used to assemble the micro Inertial confinement fusion (ICF) target which was made up of two Half-hohlraum (diameter:800 mu m similar to 1000 mu m, length:1mm) and a capsule (diameter:200 mu m similar to 500 mu m). The system structure and composing were described, and the key technology was introduced too. A new kinds of piezoelectric micro-gripper was developed in this robotic system. The assembly experimental results verify the position accuracy of capsule in the hohlraum is less than 10 mu m.