Effects analysis of large area polishing tool on aspheric surface quality

被引：0
|
作者：
Zhang Yun-long [1 ]
Zhang Feng [1 ]
Yan Jin-rui [1 ]
Su Ying [1 ]
Guo Rui [1 ]
Liu Xuan-min [1 ]
机构：
[1] Xian Inst Appl Opt, Xian 710065, Peoples R China
来源：
6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES | 2012年 / 8416卷
关键词：
Large area polishing; aspheric; surface quality; technological parameter;
D O I：
10.1117/12.973758
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An approach for rapidly polishing aspheric with large area polishing tool is presented. Then the principle of large area polishing is analyzed. Finally, by studying in the trials with the analysis results, the effects of the changes in major parameters such as speed and swing angle on the aspheric surface quality are summarized. The trials showing that using large area polishing tool to polish aspheric will make the surface roughness and profile in rapid convergence, and shorten the periods of machining high-accuracy aspheric.
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页数：8
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