Electrostatically Controllable Channel Thickness and Tunable Low-Frequency Noise Characteristics of Double-Gated Multilayer MoS2 Field-Effect Transistors with h-BN Dielectric

被引:3
|
作者
Park, Jimin [1 ]
Nam, Junho [1 ]
Son, Jangyup [1 ,2 ]
Jung, Won Jun [1 ]
Park, Min [1 ]
Lee, Dong Su [1 ]
Jeon, Dae-Young [1 ]
机构
[1] Korea Inst Sci & Technol, Inst Adv Composite Mat, Joellabuk Do 55324, South Korea
[2] KIST Sch Univ Sci & Technol UST, Div Nano & Informat Technol, Jeonbuk 55324, South Korea
基金
新加坡国家研究基金会;
关键词
multilayer MoS2 transistors; double gate; coupling effects; electrostatically controllable channel-thickness; I-on/I-off ratio; low-frequency (LF) noise; series resistance and carrier mobility; NANOWIRE TRANSISTORS; EXTRACTION; RESISTANCE;
D O I
10.1021/acsami.2c05294
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Two-dimensional transition-metal dichalcogenide (TMD) materials have attracted increasing attention in efforts to overcome fundamental issues faced by the complementary metal-oxide-semiconductor industry. Multilayer TMD materials such as MoS2 can be used for high-performance transistor-based applications; the drive currents are high and the materials handle low-frequency (LF) noise well. We fabricated double-gated multilayer MoS2 transistors using the h-BN dielectric for the top gate and silicon dioxide for the bottom gate. We systemically investigated the bottom gate voltage (V-b)-controlled electrical characteristics and the top/bottom interface-coupling effects. The effective thickness of the MoS2 channel (t(MoS2_)(eff)) was well modulated by V-b, and t(MoS2_)(eff) reduction by negative V-b dramatically improved the I-on/I-off ratio. Numerical simulation and analytical modeling with a variation of the depletion depth under different bias conditions verified the experimental results. We were also the first to observe V-b-tuned LF noise characteristics. Here, we discuss the V-b-affected series resistance and carrier mobility in detail. Our findings greatly enhance the understanding of how double-gated multilayer MoS2 transistors operate and will facilitate performance optimization in the real world.
引用
收藏
页码:25763 / 25769
页数:7
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