Novel sol-gel fabrication of integrated optical waveguides

被引：7
|
作者：
Fardad, MA
Andrews, MP
Najafi, SI
机构：
来源：
INTEGRATED OPTICS DEVICES: POTENTIAL FOR COMMERCIALIZATION | 1997年 / 2997卷
关键词：
D O I：
10.1117/12.264134
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The sol-gel method is employed to implement a new, simple and highly versatile fabrication process for integrated optical waveguides on silicon. Photosensitive glass films of several microns thickness are dip coated and optical components of various configurations through suitable masks are directly inscribed in them by ultraviolet light. Undefined regions are removed by soaking the films in an organic solvent for a few minutes. The developed ridges are then treated and planarized with a cladding layer. Altogether, the procedure is reproducible, and leads to waveguides with low propagation losses, on the order of 0.13 dB/cm.
引用
收藏
页码：72 / 78
页数：7
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