Prediction of Chamber Leak Pattern Using Time-Series Neural Network

被引：0

作者：

Kwon, Mine ^{[1
]}

Park, Byung Chan ^{[2
]}

Kim, Byungwhan ^{[1
]}

机构：

[1] Sejong Univ, Dept Elect Engn, 98 Kunja Dong, Seoul 143747, South Korea

[2] Semisysco Inc, Suwon, South Korea

来源：

NEW ASPECTS OF SYSTEMS, PTS I AND II | 2008年

关键词：

Plasma; Leak: Prediction; Time-series neural network; Monitoring; Detection; Diagnosis; Optical emission spectroscopy;

D O I：

暂无

中图分类号：

C93 [管理学]; O22 [运筹学];

学科分类号：

070105 ; 12 ; 1201 ; 1202 ; 120202 ;

摘要：

A leak of plasma chamber should be strictly monitored to maintain process quality as well as device yield. Using an Auto-Correlated Time Series Neural Network (A-NTS), a prediction model of chamber leak was developed. A total of 47 leak patterns were used to construct and test the monitoring efficacy of model. The validation errors for normal and abnormal data ranged between 51.9 and 61.7, and between 126.0 and 163.8, respectively. The validation errors for the abnormal data were more than two times larger than those for the nor-Mal data. This clearly indicates that the A-NTS model can accurately detect a leak from the chamber of plasma equipment.

引用

页码：164 / +

页数：2

共 50 条

[1] Time-series prediction using a local linear wavelet neural network
Chen, YH
Yang, B
Dong, JW
[J]. NEUROCOMPUTING, 2006, 69 (4-6) : 449 - 465
[2] GENERATION AND PREDICTION OF TIME-SERIES BY A NEURAL-NETWORK
EISENSTEIN, E
KANTER, I
KESSLER, DA
KINZEL, W
[J]. PHYSICAL REVIEW LETTERS, 1995, 74 (01) : 6 - 9
[3] An adaptive neural network in wavelet space for time-series prediction
Tsui, FC
Li, CC
Sun, MG
Sclabassi, RJ
[J]. ISCAS 96: 1996 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS - CIRCUITS AND SYSTEMS CONNECTING THE WORLD, VOL 3, 1996, : 601 - 604
[4] TIME-SERIES PREDICTION USING BELIEF NETWORK MODELS
DAGUM, P
GALPER, A
[J]. INTERNATIONAL JOURNAL OF HUMAN-COMPUTER STUDIES, 1995, 42 (06) : 617 - 632
[5] Noisy time-series prediction using pattern recognition techniques
Singh, S
[J]. COMPUTATIONAL INTELLIGENCE, 2000, 16 (01) : 114 - 133
[6] Hybridizing Pattern Matching and Neural Network for Time Series Prediction
Nguyen Thanh Son
Duong Tuan Anh
[J]. 2013 THIRD WORLD CONGRESS ON INFORMATION AND COMMUNICATION TECHNOLOGIES (WICT), 2013, : 19 - 24
[7] Time-series Prediction Based on VMD and Stack Recurrent Neural Network
Jiang, Tao
Han, Min
Wang, Jun
[J]. 2020 12TH INTERNATIONAL CONFERENCE ON ADVANCED COMPUTATIONAL INTELLIGENCE (ICACI), 2020, : 522 - 528
[8] Comparison of Neural-Network Learning Algorithms for Time-Series Prediction
George, Koshy
Harish, Madhumita
Rao, Sneha
Murali, Kruthi
[J]. 2017 INTERNATIONAL CONFERENCE ON ADVANCES IN COMPUTING, COMMUNICATIONS AND INFORMATICS (ICACCI), 2017, : 7 - 13
[9] Time-series prediction and system modeling method based neural network
[J]. Zhengzhou Daxue Xuebao, 2 (23-26):
[10] Multivariate Time-Series Prediction Using LSTM Neural Networks
Ghanbari, Reza
Borna, Keivan
[J]. 2021 26TH INTERNATIONAL COMPUTER CONFERENCE, COMPUTER SOCIETY OF IRAN (CSICC), 2021,

← 1 2 3 4 5 →