Valveless micropumps with dual polyimide diaphragms

被引：0

作者：

Ikoma, Ryuta ^{[1
]}

Komatsuzaki, Hiroki ^{[1
]}

Komori, Takayuki ^{[1
]}

Kuroda, Keigo ^{[1
]}

Saito, Hirofumi ^{[1
]}

Nishioka, Yasushiro ^{[1
]}

机构：

[1] Nihon Univ, Dept Precis Machinery Engn, Coll Sci & Technol, Funabashi, Chiba 2748501, Japan

来源：

MECHATRONICS AND APPLIED MECHANICS II, PTS 1 AND 2 | 2013年 / 300-301卷

关键词：

Micropump; polyimide; diaphragm; PIEZOELECTRIC MICROPUMP; MECHANICAL-PROPERTIES; FILMS;

D O I：

10.4028/www.scientific.net/AMM.300-301.1364

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Air-actuated valveless micropumps with dual polyimide (PI) diaphragms have been fabricated and characterized. A 5-mu m-thick PI membrane was spin-coated on Si wafer, and released by Si ICP etching. The membrane was actuated by alternating air pressure of 10 kPa. The water flow-rate achieved 80 mu l/min at the frequency of 1 Hz and 126 mu l/min at 3Hz. Due to nice adhesion between Si and polyimide diaphragms, we could fabricate the double diaphragm micropumps with simplified fabrication processes.

引用

页码：1364 / 1367

页数：4

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