Phase synchronization of micro-mirror arrays using elastic linkages

被引：2
|
作者：
Yang, LJ
Liu, CW
Chang, PZ
机构：
[1] Tamkang Univ, Dept Mech Engn, Tamsui 25137, Taiwan
[2] Natl Taiwan Univ, Inst Appl Mech, Taipei 10617, Taiwan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 95卷 / 01期
关键词：
micro-mirror array; phase synchronization; bulk-micromachining; linkages;
D O I：
10.1016/S0924-4247(01)00710-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper investigates phase synchronization and concordant resonance of micro-mirror arrays and describes in detail a proposed design for a segmented micro-mirror with elastic linkages. The device replaces a conventional large area mirror, thus increasing the working frequency and allowing micro-mirror arrays to induce smaller vibration amplitude. The torsional micro-mirror array is fabricated using three conventional masks based on silicon bulk-micromachining technology. Experimental results of the prototype sample show that the phase difference among the mirror segments of the mirror array is below 1/15 cycle. 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：55 / 60
页数：6
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