Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics

被引：7
|
作者：
Ma, Jianqiang [1 ]
Liu, Ying [2 ]
Hu, Yanlei [2 ]
Xu, Chen [3 ]
Li, Baoqing [2 ]
Chu, Jiaru [2 ]
机构：
[1] Ningbo Univ, Fac Mech Engn & Mech, Ningbo 315211, Zhejiang, Peoples R China
[2] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, Hefei 230027, Peoples R China
[3] Nanjing Inst Astron Opt & Technol, Natl Astron Observ, CAS, Nanjing 210042, Jiangsu, Peoples R China
来源：
OPTICAL ENGINEERING | 2013年 / 52卷 / 01期
关键词：
astronomy; adaptive optics; unimorph deformable mirror; lead zirconate titanate thick film; DESIGN;
D O I：
10.1117/1.OE.52.1.016602
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents a low-cost silicon unimorph deformable mirror (DM) that will be used for astronomical adaptive optics. The device has a simple construction consisting of a 400-mu m-thick silicon wafer and a 200-mu m-thick lead zirconate titanate film, with 214 actuators and 50-mm active aperture. The actuator displacement of the fabricated device is about 1 mu m at 50 V. And the resonance frequency is 550 Hz. The simulation and experimental generation of Zernike mode shapes indicate that the fabricated DM has an excellent correction performance for both low order and high order aberrations. (C) 2013 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.OE.52.1.016602]
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页数：6
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