On the design and simulation of high speed electro-optic modulator based on SOI waveguide MOS dual capacitor structure

被引:0
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作者
Chen, SW [1 ]
Tu, XG [1 ]
Yu, JZ [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
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O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:54 / 56
页数:3
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