Nonlinear optical properties of silicon nanocrystals grown by plasma-enhanced chemical vapor deposition

被引:119
|
作者
Prakash, GV
Cazzanelli, M
Gaburro, Z
Pavesi, L
Iacona, F
Franzò, G
Priolo, F
机构
[1] Univ Trent, INFM, I-38050 Povo, Italy
[2] Univ Trent, Dipartimento Fis, I-38050 Povo, Italy
[3] Univ Trent, INFM, I-38100 Trento, Italy
[4] Univ Trent, Dipartimento Fis, I-38100 Trento, Italy
[5] CNR, IMETEM, I-95121 Catania, Italy
[6] Univ Catania, INFM, I-95129 Catania, Italy
[7] Univ Catania, Dipartimento Fis, I-95129 Catania, Italy
关键词
D O I
10.1063/1.1456241
中图分类号
O59 [应用物理学];
学科分类号
摘要
The real and imaginary parts of third-order nonlinear susceptibility chi((3)) have been measured for silicon nanocrystals embedded in SiO2 matrix, formed by high temperature annealing of SiOx films prepared by plasma-enhanced chemical vapor deposition. Measurements have been performed using a femtosecond Ti-sapphire laser at 813 nm using the Z-scan technique with maximum peak intensities up to 2x10(10) W/cm(2). The real part of chi((3)) shows positive nonlinearity for all samples. Intensity-dependent nonlinear absorption is observed and attributed to two-photon absorption processes. The absolute value of chi((3)) is on the order of 10(-9) esu and shows a systematic increase as the silicon nanocrystalline size decreases. This is due to quantum confinement effects. (C) 2002 American Institute of Physics.
引用
收藏
页码:4607 / 4610
页数:4
相关论文
共 50 条
  • [1] Structural and optical properties of silicon nanocrystals grown by plasma-enhanced chemical vapor deposition
    Prakash, GV
    Daldossa, N
    Degoli, E
    Iacona, F
    Cazzanelli, M
    Gaburro, Z
    Pucker, G
    Dalba, P
    Rocca, F
    Moreira, EC
    Franzò, G
    Pacifici, D
    Priolo, F
    Arcangeli, C
    Filonov, AB
    Ossicini, S
    Pavesi, L
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2001, 1 (02) : 159 - 168
  • [2] Linear and nonlinear optical properties of plasma-enhanced chemical-vapour deposition grown silicon nanocrystals
    Prakash, GV
    Cazzanelli, M
    Gaburro, Z
    Pavesi, L
    Iacona, F
    Franzò, G
    Priolo, F
    JOURNAL OF MODERN OPTICS, 2002, 49 (5-6) : 719 - 730
  • [3] Optical properties of silicon oxynitride films grown by plasma-enhanced chemical vapor deposition
    Aschwanden, R.
    Kothernamn, R.
    Albert, M.
    Golla, C.
    Meier, C.
    THIN SOLID FILMS, 2021, 736
  • [4] Nonlinear optical properties of plasma enhanced chemical vapour deposition grown silicon nanocrystals
    Prakash, GV
    Cazzanelli, M
    Gaburro, Z
    Pavesi, L
    Iacona, F
    Priolo, F
    MATERIALS AND DEVICES FOR OPTOELECTRONICS AND MICROPHOTONICS, 2002, 722 : 219 - 222
  • [5] Optical properties of nanocrystalline silicon films deposited by plasma-enhanced chemical vapor deposition
    Ali, Atif Mossad
    OPTICAL MATERIALS, 2007, 30 (02) : 238 - 243
  • [6] Bonding structure of silicon xynitride grown by plasma-enhanced chemical vapor deposition
    Wong, C. K.
    Wong, Hei
    Filip, V.
    Chung, P. S.
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (5B): : 3202 - 3205
  • [7] Structure of silicon nitride layers grown by plasma-enhanced chemical vapor deposition
    Fainer, NI
    Rumyantsev, YM
    Kosinova, ML
    Yur'ev, GS
    Maksimovskii, EA
    Kuznetsov, FA
    INORGANIC MATERIALS, 1998, 34 (10) : 1053 - 1056
  • [8] The optical properties of silicon-rich silicon nitride prepared by plasma-enhanced chemical vapor deposition
    Yoshinaga, Seiya
    Ishikawa, Yasuaki
    Kawamura, Yusuke
    Nakai, Yuya
    Uraoka, Yukiharu
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2019, 90 : 54 - 58
  • [9] Structural and optical properties of nanocrystalline silicon films deposited by plasma-enhanced chemical vapor deposition
    Ali, AM
    Inokuma, T
    Kurata, Y
    Hasegawa, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (01): : 169 - 175
  • [10] Linear and nonlinear optical properties of Si nanocrystals in SiO2 deposited by plasma-enhanced chemical-vapor deposition
    Hernandez, S.
    Pellegrino, P.
    Martinez, A.
    Lebour, Y.
    Garrido, B.
    Spano, R.
    Cazzanelli, M.
    Daldosso, N.
    Pavesi, L.
    Jordana, E.
    Fedeli, J. M.
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (06)