Comparison of the Optical Planar Waveguide Sensors' Characteristics Based on Guided-Mode Resonance

A comparison of optical sensors' characteristics based on guided-mode resonance has been carried out. It was considered a prism structure with a metal film, a metal grating on a metal substrate and a dielectric grating on a dielectric substrate. It is shown that the main characteristics are determined by the sensitivity of the constant propagation of the respective waveguides on a change in wavelength and a change in the refractive index of the tested medium. In addition, they depend on the full width at half maximum of the spectral or angular reflectance dependence. The corresponding analytical relationships obtained for the three types of sensors are almost the same. It is demonstrated that the ratio of the sensor spectral sensitivity on the resonance curve spectral width is equal to the ratio of the angular sensitivity on the angular width of the corresponding resonance curve for all three types of sensors.